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Semiconductor Yield Enhancement Solutions for Next Generation

Overview Among LSI (large-scale integration) manufacturers, yield enhancement is one of the essential means of securing a profit. For this purpose, semiconductor inspection systems are required to handle a larger number of defects to be detected and localize the faulty points. Hitachi has been offering high-performance semiconductor and evaluation tools applicable to 130- to 90-nm nodes as systems to support yield enhancement in semiconductor manufacturing. This paper introduces performance-upgraded semiconductor inspection and evaluation tools, applicable to 90-nm nodes and beyond, and describes solutions for semiconductor yield enhancement.

Further White Paper Details
Publisher	Hitachi	File Format	PDF, requires Acrobat Rdr 5
Date Published	October 2002	Downloads	72
Format	White Papers
Topics	Monitoring Systems, Semiconductor Tech. - Manufacturing

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